The Keithley 6517B Electrometer/High Resistance Meter is the worldwide research laboratory standard for sensitive measurements. With over 60 years of low level measurement expertise, Keithley electrometers provide reliable measurements of current levels down to 10 aA (10×10–18 A), charge levels down to 1 fC, and the highest resistance measurements available up to 1018 Ω. The 6517B is also capable of measuring the largest voltage range—up to 200 V—with an input impedance exceeding 200 TΩ. All this performance is built into an instrument that operates as simply as a digital multimeter.
| Key Features |
| Measures resistances up to 10¹⁸Ω |
| 10 aA (10×10–¹⁸ A) current measurement resolution |
| Complete hardware-software solution for ASTM D257 high resistivity measurements with the 6517B, 8009 Resistivity Test Fixture, and the KickStart High Resistivity Application |
| <3 fA input bias current |
| 6½-digit high accuracy measurement mode |
| <20 µV burden voltage on the lowest current ranges |
| Voltage measurements up to 200 V with >200 Ω input impedance |
| Built-in ±1000 V voltage source |
| Unique alternating polarity voltage sourcing and measurement method for high resistance measurements |
| Built-in test sequences for four different device characterization tests, surface and volume resistivity, surface insulation resistance, and voltage sweeping |
| Optional plug-in scanner cards for testing up to ten devices or material samples with one test setup |
| GPIB and RS-232 interfaces |
The 5½-digit Model 6514 and Model 6517B Electrometers offer 1fA sensitivity, >200TΩ input impedance on voltage measurements, and charge measurements down to 10fC. The 6½-digit Model 6430 Sub-Femtoamp Remote SourceMeter SMU Instrument can measure current with 1aA sensitivity. Its low noise and drift performance make it ideal for research on single electron devices, highly resistive nanowires and nanotubes, polymers, and electrochemical applications.
| Key Features |
| Extremely low noise (0.4fAp-p for 6430, <1fA for 6517B and 6514) |
| Resistance measurements up to 1016Ω (6517B) |
| Remote PreAmp can be located at the signal source (6430) |
| Low burden voltage |
| Built-in ±1kV voltage source with sweep capability (6517B) |
| Optional Model 8009 Resistivity Chamber for measuring volume and surface resistivities of sample materials (6517B) |
| High measurement speeds even on low-level signals |
| Programmable digital I/O and built-in interfaces |
| Benefits |
| Ensures more accurate measurements of the extremely low currents common in device and materials research. |
| Measures resistance on ultra-high resistance materials and insulators accurately. |
| Allows making a direct or very short connection to the signal source, minimizing noise sources such as cable noise. |
| Eliminates errors that affect the accuracy of low current measurements. |
| Simplifies performing leakage, breakdown, and resistance testing, as well as volume (Ω-cm) and surface resistivity (Ω/square) measurements on high resistivity materials. |
| Protects you from contact with potentially hazardous voltages —opening the lid of the chamber automatically turns off the instrument’s voltage source. |
| Allows faster low-level component testing. |
| Simplifies building automated component test systems. |
| Specifications |
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| High Resistance/Low Current Electrometers Series 6500, 6430 |
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| Series Overview |
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| Model | Current | Voltage | Resistance | Charge | Source |
| 6514 | 100aA - 20mA | 10µV - 200V | 10mΩ - 200GΩ | 10fC - 20μC | - |
| 6517B | 10aA - 20mA | 10µV - 200V | 100Ω - 10PΩ | 10fC - 2μC | 0 - ±1000V |
| 6430 | 10aA - 100mA | 1µV - 200V | 1µΩ - >20TΩ | - | 0 - ±200V
0 - ±100mA
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